Analysis of Microelectronic Materials and Devices

Analysis of Microelectronic Materials and Devices GRASSERBAUER, M.

This book presents, for the first time, a comprehensive survey of analytical techniques currently used in support of all stages of microelectronic materials and device processing. The diversity of topics covered in this book has been achieved by bringing together an international field of authors contributing specialized individual chapters.
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Specificaties

Isbn
9780471950134
Uitgever
John Wiley and Sons Ltd
Druk
1e
Verschenen
01-01-1994
Taal
Engels
Bladzijden
980 pp.
Bindwijze
Paperback

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